Removal-of-nanoparticles-from-CMP-wastewater-by-magnetic
- 海之魂
-
0 次阅读
-
0 次下载
-
2020-05-02 09:46:19
文档简介：
TechnicalNoteRemovalofnanoparticlesfromCMPwastewaterbymagneticseedingaggregationChing-JuMonicaChin*,Pei-WenChen,Li-JenWangGraduateInstituteofEnvironmentalEngineering,NationalCentralUniversity,300JungdaRoad,JungliCity,Taoyuan320,Taiwan,ROCReceived21March2005;receivedinrevisedform19September2005;accepted22September2005Availableonline9November2005AbstractCMPwastewatershavehighsolidscontentresultedfromabrasivenanoparticles.TremendousamountofultrapurewaterconsumptionalsomakestheremovalofnanoparticlesfromCMPwastewatersanimportantissue.Magneticseed-ingaggregationofsilicananoparticlesfromtheoxideCMPwastewaterisstudiedinthiswork.Magnetitenanoparticlesweresynthesizedandusedasseedingparticles.TheturbidityoftheCMPwastewaterwasreducedfrom110NTUto7NTUwhensolutionpHwas6andnoadditionofsalt.Thisisbecausesilicaandmagnetitenanoparticleswerehighlyoppositelychargedandtheaggregationbetweensilicaandmagnetitenanoparticleswasachievedbyelectrostaticattrac-tions.Whentheseededwastewaterwasplacedinamagneticfieldstrengthhigherthan800G,theturbidityoftheCMPwastewaterwasreducedto1NTU,whichwasclearerthantheCMPwastewatertreatedbymanyothertechnologies.�2005ElsevierLtd.Allrightsreserved.Keywords:CMPwastewater;Nano-magnetite;Magneticseedingaggregation1.IntroductionNanoparticleshavefascinatedindustriesandresearchersfortheirbroadapplicationsinelectronicsdevices,biomedicines,andseparationprocesses.Itcanbeforeseenthattherewillbemoreandmorenanoparti-clesmanufacturedanddischargedtonaturalwaterenvi-ronments.Silicananoparticlesinchemicalmechanicalpolishing(CMP)wastewatersfromthesemiconductorindustry,forinstance,havebecomeamajorsourceofnanoscalewaste.SilicananoparticlesarecommonlyusedasabrasiveinCMPslurries,inwhichparticlesarehighlychargedtoavoidaggregationsbetweenparti-clesandparticlesorparticlesandwafersurfaces.There-fore,theCMPwastewaterhasveryhighsolidscontentandtheremovalofthosesolidshasreceivedgreatattentions.ConventionalchemicalcoagulationismostlyusedtoremovesilicananoparticlesfromtheCMPwastewater;however
扫描二维码
评论
发表评论